Synthesis of thin films using the jet nonequilibrium low pressure plasma

被引：0
|
作者：
Galyautdinov, RT [1 ]
Kashapov, NF [1 ]
机构：
[1] Kazan Pump Mech Res Inst, Kazan, Russia
来源：
IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII AVIATSIONAYA TEKHNIKA | 2001年 / 02期
关键词：
D O I：
暂无
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
We study SiOx and TiOx (0<x<2) thin film coatings with controllable absorption obtained using the nonequilibrium low pressure plasma. We suggest the method for constructing interference systems which is based on varying the complex part of high-frequency, dielectric permeability,, this method makes it passible to realize systems with the spectral characteristics related on the basis of two layers. Th efficiency of this method is illustrated by the example of antireflection neutral optical filters.
引用
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页码：79 / 80
页数：2
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