Synthesis of Mica Thin Film by Pulsed Laser Deposition

被引：1

作者：

Nakasone, Yuta ^{[1
]}

Nakai, Hirokazu ^{[1
]}

Miyake, Yumiko ^{[1
]}

Yamauchi, Ryosuke ^{[1
]}

Tsuchimine, Nobuo ^{[2
]}

Kobayashi, Susumu ^{[2
]}

Sano, Yoshifumi ^{[3
]}

Takezawa, Nobutaka ^{[4
]}

Mitsuhashi, Masahiko ^{[5
]}

Kaneko, Satoru ^{[5
]}

Funakubo, Hiroshi ^{[1
]}

Yoshimoto, Mamoru ^{[1
]}

机构：

[1] Tokyo Inst Technol, Yokohama, Kanagawa 2268503, Japan

[2] TOSHIMA Mfg Co Ltd, Saitama 3550036, Japan

[3] YAMAGUCHI MICA Co Ltd, Aichi 4410106, Japan

[4] Tochigi Ind Technol Ctr, Utsunomiya, Tochigi 3213224, Japan

[5] Kanagawa Ind Technol Ctr, Ebina, Kanagawa 2430435, Japan

来源：

APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 05期

关键词：

ROOM-TEMPERATURE GROWTH; EPITAXIAL-GROWTH; SAPPHIRE; BIOTITE;

D O I：

10.1143/APEX.4.055502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Synthesis of crystalline biotite-mica thin films was examined by applying a two-step process: (1) low-temperature growth of the mica film precursor on an ultrasmooth sapphire (alpha-Al2O3 single crystal) substrate by pulsed laser deposition using a sintered biotite ceramics target and (2) post-annealing in vacuum. X-ray diffraction and Raman scattering spectroscopy confirmed that a c-axis-oriented polycrystalline biotite-mica thin film was obtained by post-annealing the 500 degrees C-grown film precursor at temperatures above 700 degrees C in vacuum. An atomic-scale pattern corresponding to that of the cleaved natural mica surface was observed on the surface of thin film by atomic force spectroscopy. (C) 2011 The Japan Society of Applied Physics

引用

页数：3

共 50 条

[11] Calcium phosphate thin film processing by pulsed laser deposition and in situ assisted ultraviolet pulsed laser deposition
V. Nelea
H. Pelletier
M. Iliescu
J. Werckmann
V. Craciun
I. N. Mihailescu
C. Ristoscu
C. Ghica
Journal of Materials Science: Materials in Medicine, 2002, 13 : 1167 - 1173
[12] Calcium phosphate thin film processing by pulsed laser deposition and in situ assisted ultraviolet pulsed laser deposition
Nelea, V
Pelletier, H
Iliescu, M
Werckmann, J
Craciun, V
Mihailescu, IN
Ristoscu, C
Ghica, C
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 2002, 13 (12) : 1167 - 1173
[13] Superhydrophobicity of polytetrafluoroethylene thin film fabricated by pulsed laser deposition
Kwong, H. Y.
Wong, M. H.
Wong, Y. W.
Wong, K. H.
APPLIED SURFACE SCIENCE, 2007, 253 (22) : 8841 - 8845
[14] Research on the Experiment of ZnO Thin Film by Pulsed Laser Deposition
Ke, Qiang
Wang, Yifan
Hu, Juju
NEW MATERIALS AND PROCESSES, PTS 1-3, 2012, 476-478 : 2379 - 2383
[15] Pulsed laser deposition and characterization of InZnO alloyed thin film
Shan, F. K.
Liu, G. X.
Shin, B. C.
Lee, W. J.
Oh, W. T.
HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2, 2008, 368-372 : 308 - 311
[16] Thin-film deposition via pulsed laser ablation
Panayotov, VG
Kelly, MC
Gomlak, GG
Birdwhistell, TLT
Koplitz, BD
THIN FILMS - STRUCTURE AND MORPHOLOGY, 1997, 441 : 469 - 474
[17] Characterization of Palladium thin film deposited by pulsed laser deposition
Singh, Udaibir
Jha, Nisha
Singh, Tikendra Prakash
Kapoor, Avinashi
NONLINEAR FREQUENCY GENERATION AND CONVERSION: MATERIALS, DEVICES, AND APPLICATIONS IX, 2010, 7582
[18] Pulsed Laser Deposition-based Thin Film Microbatteries
Fenech, Michael
Sharma, Neeraj
CHEMISTRY-AN ASIAN JOURNAL, 2020, 15 (12) : 1829 - 1847
[19] Characterization of Palladium thin film deposited by pulsed laser deposition
Singh, Udaibir
Jha, Nisha
Kapoor, Avinashi
INTERNATIONAL CONFERENCE ON APPLICATIONS OF OPTICS AND PHOTONICS, 2011, 8001
[20] Epitaxial growth of graphene thin film by pulsed laser deposition
Wang, Jin
Xiong, Zhengwei
Yu, Jian
Yin, Hongbu
Wang, Xuemin
Peng, Liping
Wang, Yuying
Wang, Xinmin
Jiang, Tao
Cao, Linhong
Wu, Weidong
Wang, Chuanbin
Zhang, Lianmeng
MICRO & NANO LETTERS, 2015, 10 (11) : 649 - 652

← 1 2 3 4 5 →