Rotational MEMS mirror with latching arm for silicon photonics

We present an innovative rotational MEMS mirror that can control the direction of propagation of light beams inside of planar waveguides implemented in silicon photonics. Potential applications include but are not limited to optical telecommunications, medical imaging, scan and spectrometry. The mirror has a half-cylinder shape with a radius of 300 mu m that provides low and constant optical losses over the full angular displacement range. A circular comb drive structure is anchored such that it allows free or latched rotation experimentally demonstrated over 8.5 degrees (X-Y planar rotational movement) using 290V electrostatic actuation. The entire MEMS structure was implemented using the MEMSCAP SOIMUMPs process. The center of the anchor beam is designed to be the approximate rotation point of the circular comb drive to counter the rotation offset of the mirror displacement. A mechanical characterization of the MEMS mirror is presented. The latching mechanism provides up to 20 different angular locking positions allowing the mirror to counter any resonance or vibration effects and it is actuated with an electrostatic linear comb drive. An innovative gap closing structure was designed to reduce optical propagation losses due to beam divergence in the interstitial space between the mirror and the planar waveguide. The gap closing structure is also electrostatically actuated and includes two side stoppers to prevent stiction.