The pico-Newton order force measurement with a calibrated carbon nanotube probe

被引：0

作者：

Arai, F ^{[1
]}

Nakajima, M ^{[1
]}

Dong, LX ^{[1
]}

Fukuda, T ^{[1
]}

机构：

[1] Nagoya Univ, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

PROCEEDINGS OF THE 2003 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM 2003), VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

Force measurement with pico-Newton (pN) order resolution using a carbon nanotube (CNT) probe, which is calibrated by the electromechanical resonance, is presented. Based on the theoretical analysis, a CNT is suitable material for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of the commercial available atomic force microscope (AFM) cantilever or tungsten needle probe by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. The elastic moduli of CNTs are calibrated from electromechanical resonance frequency by applied electrostatic forces. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.

引用

页码：691 / 696

页数：6

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