Offset of coherent envelope position due to phase change on reflection

被引:44
作者
Harasaki, A
Schmit, J
Wyant, JC
机构
[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA
[2] Veeco Metrol Grp, Tucson, AZ 85711 USA
关键词
D O I
10.1364/AO.40.002102
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10-40 nm for metallic surfaces. (C) 2001 Optical Society of America.
引用
收藏
页码:2102 / 2106
页数:5
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