The Solvent Distribution Effect on the Self-Assembly of Symmetric Triblock Copolymers during Solvent Vapor Annealing

被引:25
作者
Xiong, Shisheng [1 ]
Li, Dongxue [2 ]
Hur, Su-Mi [4 ]
Craig, Gordon S. W. [3 ]
Arges, Christopher G. [5 ]
Qu, Xin-Ping [2 ]
Nealey, Paul F. [3 ]
机构
[1] Fudan Univ, Sch Informat Sci & Technol, Shanghai 200433, Peoples R China
[2] Fudan Univ, Sch Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[3] Univ Chicago, Inst Mol Engn, Chicago, IL 60637 USA
[4] Chonnam Natl Univ, Sch Polymer Sci & Engn, Gwangju 61186, South Korea
[5] Louisiana State Univ, Cain Dept Chem Engn, Baton Rouge, LA 70803 USA
关键词
POLYDIMETHYLSILOXANE BLOCK-COPOLYMER; THIN-FILMS; DILUTION APPROXIMATION; SOLUBILITY PARAMETERS; NANOSTRUCTURES; MORPHOLOGY; PATTERNS; BEHAVIOR; ARRAYS;
D O I
10.1021/acs.macromol.8b01275
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Using a combination of systematic experiments and Monte Carlo simulations, this report demonstrates that the distribution of neutral solvent has a strong impact on the quality and kinetics of the self-assembly of block copolymers in thin films. Both methyl ethyl ketone (MEK, a good solvent) and acetone (a relatively poor solvent) were used for the solvent vapor annealing (SVA) of thin films of poly(2-vinylpyridine)-block-polystyrene-block-poly(2-vinylpyridine) (VSV) triblock copolymer. Acetone, the poorer solvent, accumulated at the interface of the VSV domains, while MEK was distributed more uniformly throughout the VSV. As a result, acetone screened the interactions between the blocks of the copolymer more than MEK. Because MEK afforded less screening of the different blocks, solvent annealing with MEK led to self-assembly of lower molecular weight VSV triblock copolymers than was possible with acetone. Solvent annealing with MEK also led to slower self-assembly kinetics and smaller correlation lengths in the assembled pattern compared to solvent annealing with acetone. Finally, long-range ordered structures of low molecular weight VSV triblock copolymer on a chemical pattern via directed self-assembly was demonstrated with 6x density multiplication by annealing in MEK.
引用
收藏
页码:7145 / 7151
页数:7
相关论文
共 39 条
[1]   Gradient Solvent Vapor Annealing of Block Copolymer Thin Films Using a Microfluidic Mixing Device [J].
Albert, Julie N. L. ;
Bogart, Timothy D. ;
Lewis, Ronald L. ;
Beers, Kathryn L. ;
Fasolka, Michael J. ;
Hutchison, J. Brian ;
Vogt, Bryan D. ;
Epps, Thomas H., III .
NANO LETTERS, 2011, 11 (03) :1351-1357
[2]   20 nm Pitch Directed Block Copolymer Assembly Using Solvent Annealing for Bit Patterned Media [J].
Bosworth, Joan K. ;
Dobisz, Elizabeth ;
ruiz, Ricardo .
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2010, 23 (02) :145-148
[3]   Solvent annealing thin films of poly(isoprene-b-lactide) [J].
Cavicchi, KA ;
Berthiaume, KJ ;
Russell, TP .
POLYMER, 2005, 46 (25) :11635-11639
[4]   Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment [J].
Delgadillo, Paulina A. Rincon ;
Gronheid, Roel ;
Thode, Christopher J. ;
Wu, Hengpeng ;
Cao, Yi ;
Neisser, Mark ;
Somervell, Mark ;
Nafus, Kathleen ;
Nealey, Paul F. .
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (03)
[5]   Theoretically informed coarse grain simulations of block copolymer melts: method and applications [J].
Detcheverry, Francois A. ;
Pike, Darin Q. ;
Nagpal, Umang ;
Nealey, Paul F. ;
de Pablo, Juan J. .
SOFT MATTER, 2009, 5 (24) :4858-4865
[6]   Monte Carlo Simulation of Coarse Grain Polymeric Systems [J].
Detcheverry, Francois A. ;
Pike, Darin Q. ;
Nealey, Paul F. ;
Mueller, Marcus ;
de Pablo, Juan J. .
PHYSICAL REVIEW LETTERS, 2009, 102 (19)
[7]   Thermo-Solvent Annealing of Polystyrene-Polydimethylsiloxane Block Copolymer Thin Films [J].
Dinachali, Saman Safari ;
Bai, Wubin ;
Tu, Kun-Hua ;
Choi, Hong Kyoon ;
Zhang, Jinshuo ;
Kreider, Melissa E. ;
Cheng, Li-Chen ;
Ross, Caroline A. .
ACS MACRO LETTERS, 2015, 4 (05) :500-504
[8]   THEORY OF BLOCK COPOLYMER SOLUTIONS - NONSELECTIVE GOOD SOLVENTS [J].
FREDRICKSON, GH ;
LEIBLER, L .
MACROMOLECULES, 1989, 22 (03) :1238-1250
[9]   Large-scale alignment of ABC block copolymer microdomains via solvent vapor treatment [J].
Fukunaga, K ;
Elbs, H ;
Magerle, R ;
Krausch, G .
MACROMOLECULES, 2000, 33 (03) :947-953
[10]   Solvothermal Annealing of Block Copolymer Thin Films [J].
Gotrik, Kevin W. ;
Ross, C. A. .
NANO LETTERS, 2013, 13 (11) :5117-5122