Optical and electrical properties of AZO/Ni/ITO transparent conductor

被引：11
作者：
Yun, Ju-Hyung [1 ]
Duraisamy, Navaneethan [1 ]
Kumar, M. Melvin David [1 ]
Kim, Joondong [1 ]
机构：
[1] Incheon Natl Univ, Dept Elect Engn, Inchon 406772, South Korea
来源：
MATERIALS LETTERS | 2015年 / 143卷
关键词：
AZO film; Ni-insertion; ITO film; AZO/Ni/ITO tri-layer; Carrier mobility; Figure of merit; INDIUM-TIN-OXIDE; ZNO MULTILAYER COATINGS; THIN-FILMS; OPTOELECTRONIC PROPERTIES; ELECTRODES; LAYER; AG; DEPOSITION; DISPLAYS;
D O I：
10.1016/j.matlet.2014.12.043
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Optical and electrical properties of transparent-conductive-oxide (TCO) films were investigated by bi-layers of aluminum-doped-zinc-oxide/indium-tin-oxide (AZO/ITO) and tri-layers (AZO/Ni/ITO). Ni-insertion is efficient to improve the carrier mobility with reduction of sheet resistance. According to tuning TCO thickness, AZO/Ni/ITO (50/5/50 nm) case exhibited the highest carrier mobility (56.90 cm(2) V-1 s(-1)) rather than other tri-layers or bi-layers. The optical and electrical properties of TCO layers were analyzed by figure of merit. A maximum value (3.12 x 10(-6) Omega(-1)) was found from AZO/Ni/ITO (5015/50 nm). These results support the use of Ni insertion in transparent metal oxide electrode for photoelectric applications. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：215 / 218
页数：4
相关论文
共 26 条
[11]   Effects of thermal treatment on the electrical and optical properties of silver-based indium tin oxide/metal/indium tin oxide structures [J].
Jung, YS ;
Choi, YW ;
Lee, HC ;
Lee, DW .
THIN SOLID FILMS, 2003, 440 (1-2) :278-284
[12]  
Jung YS, 2013, TRANS ELECTR ELECTRO, V14, P9
[13]   Investigation of conductive and transparent ITO/Ni/ITO multilayer films deposited by a magnetron sputter process [J].
Kim, J. C. ;
Shin, C. H. ;
Jeong, C. W. ;
Kwon, Y. J. ;
Park, J. H. ;
Kim, Daeil .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2010, 268 (02) :131-134
[14]   ITO/AuATO multilayer thin films for transparent conducting electrode applications [J].
Kim, Y. S. ;
Park, J. H. ;
Choi, D. H. ;
Jang, H. S. ;
Lee, J. H. ;
Park, H. J. ;
Choi, J. I. ;
Ju, D. H. ;
Lee, J. Y. ;
Kim, Daeil .
APPLIED SURFACE SCIENCE, 2007, 254 (05) :1524-1527
[15]   Dependence of the electrical and optical behaviour of ITO-silver-ITO multilayers on the silver properties [J].
Klöppel, A ;
Kriegseis, W ;
Meyer, BK ;
Scharmann, A ;
Daube, C ;
Stollenwerk, J ;
Trube, J .
THIN SOLID FILMS, 2000, 365 (01) :139-146
[16]   Influence of substrate temperature and sputtering atmosphere on electrical and optical properties of double silver layer systems [J].
Klöppel, A ;
Meyer, B ;
Trube, J .
THIN SOLID FILMS, 2001, 392 (02) :311-314
[17]   The influence of Ni layer and thickness of AZO layers on the optoelectronic properties of AZO/Ni/AZO tri-layer deposited at room temperature [J].
Kumar, M. Melvin David ;
Baek, Seon Mi ;
Kim, Joondong .
MATERIALS LETTERS, 2014, 137 :132-135
[18]   Electron scattering mechanisms in indium-tin-oxide thin films: grain boundary and ionized impurity scattering [J].
Lee, HC ;
Park, OO .
VACUUM, 2004, 75 (03) :275-282
[19]   Effect of Al Nanoparticles on the Microstructure, Electrical, and Optical Properties of AZO/Al/AZO Trilayer Thin Film [J].
Lin, Yen-Sheng ;
Tseng, Wei-Chih .
JOURNAL OF ELECTRONIC MATERIALS, 2012, 41 (03) :437-441
[20]   ZnO transparent conducting films deposited by pulsed laser deposition for solar cell applications [J].
Matsubara, K ;
Fons, P ;
Iwata, K ;
Yamada, A ;
Sakurai, K ;
Tampo, H ;
Niki, S .
THIN SOLID FILMS, 2003, 431 :369-372
123