Optical and electrical properties of AZO/Ni/ITO transparent conductor

被引:11
作者
Yun, Ju-Hyung [1 ]
Duraisamy, Navaneethan [1 ]
Kumar, M. Melvin David [1 ]
Kim, Joondong [1 ]
机构
[1] Incheon Natl Univ, Dept Elect Engn, Inchon 406772, South Korea
关键词
AZO film; Ni-insertion; ITO film; AZO/Ni/ITO tri-layer; Carrier mobility; Figure of merit; INDIUM-TIN-OXIDE; ZNO MULTILAYER COATINGS; THIN-FILMS; OPTOELECTRONIC PROPERTIES; ELECTRODES; LAYER; AG; DEPOSITION; DISPLAYS;
D O I
10.1016/j.matlet.2014.12.043
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Optical and electrical properties of transparent-conductive-oxide (TCO) films were investigated by bi-layers of aluminum-doped-zinc-oxide/indium-tin-oxide (AZO/ITO) and tri-layers (AZO/Ni/ITO). Ni-insertion is efficient to improve the carrier mobility with reduction of sheet resistance. According to tuning TCO thickness, AZO/Ni/ITO (50/5/50 nm) case exhibited the highest carrier mobility (56.90 cm(2) V-1 s(-1)) rather than other tri-layers or bi-layers. The optical and electrical properties of TCO layers were analyzed by figure of merit. A maximum value (3.12 x 10(-6) Omega(-1)) was found from AZO/Ni/ITO (5015/50 nm). These results support the use of Ni insertion in transparent metal oxide electrode for photoelectric applications. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:215 / 218
页数:4
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