Distinguishing dislocation densities in intrinsic layers of pin diamond diodes using two photon-excited photoluminescence imaging

被引:4
作者
Honbu, Tatsuya [1 ,2 ]
Takeuchi, Daisuke [1 ,2 ]
Ichikawa, Kimiyoshi [3 ]
Ohmagari, Shinya [1 ]
Teraji, Tokuyuki [3 ]
Ogura, Masahiko [1 ]
Kato, Hiromitsu [1 ]
Makino, Toshiharu [1 ]
Shoji, Ichiro [2 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Adv Power Elect Res Ctr, 1-1-1 Umezono, Tsukuba, Ibaraki 3058568, Japan
[2] Chuo Univ, Fac Sci & Engn, Dept Elect Elect & Commun Engn, Bunkyo Ku, 1-13-27 Kasuga, Tokyo 1128551, Japan
[3] Natl Inst Mat Sci NIMS, Opt & Elect Mat Unit, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
关键词
Cathodoluminescence; Defect characterization; Diamond film; Electron emission; Pindiode; Two-photon excitation photoluminescence; NEGATIVE-ELECTRON-AFFINITY; CONDUCTION; SURFACES;
D O I
10.1016/j.diamond.2021.108463
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The density of dislocations that occur in the intrinsic (i-) layer of a pin diamond diode was estimated from twophoton excitation photoluminescence (2PPL) imaging. Results elucidated data obtained from device characteristic measurements and cathodoluminescence (CL). Generation and diffusion of free carriers for deep-level emission in the i-layer have no effect on emission images observed using the 2PPL method. Therefore, to evaluate the pin diode structure, the influence of free carrier propagation on the adjacent layer can be avoided. However, this effect cannot be ignored when using CL. These findings are expected to be important for assessing diamond device performance.
引用
收藏
页数:7
相关论文
共 21 条
[1]   PHOTOELECTRIC-EMISSION FROM NEGATIVE-ELECTRON-AFFINITY DIAMOND(111) SURFACES - EXCITON BREAKUP VERSUS CONDUCTION-BAND EMISSION [J].
BANDIS, C ;
PATE, BB .
PHYSICAL REVIEW B, 1995, 52 (16) :12056-12071
[2]   Surface cleaning, electronic states and electron affinity of diamond (100), (111) and (110) surfaces [J].
Baumann, PK ;
Nemanich, RJ .
SURFACE SCIENCE, 1998, 409 (02) :320-335
[3]   A SPECTROSCOPIC STUDY OF OPTICAL-CENTERS IN DIAMOND GROWN BY MICROWAVE-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].
COLLINS, AT ;
KAMO, M ;
SATO, Y .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2507-2514
[4]   Investigation of the effect of hydrogen on electrical and optical properties in chemical vapor deposited on homoepitaxial diamond films [J].
Hayashi, K ;
Yamanaka, S ;
Watanabe, H ;
Sekiguchi, T ;
Okushi, H ;
Kajimura, K .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :744-753
[5]   N-type diamond growth by phosphorus doping on (001)-oriented surface [J].
Kato, Hiromitsu ;
Makino, Toshiharu ;
Yamasaki, Satoshi ;
Okushi, Hideyo .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (20) :6189-6200
[6]   Images and Energy Distributions of Electrons Emitted from a Diamond pn-Junction Diode [J].
Kono, Shozo ;
Koizumi, Satoshi .
E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2009, 7 :660-664
[7]  
Maki T., HYDROGENATING EFFECT, DOI [10.1143/JJAP.31.L1446, DOI 10.1143/JJAP.31.L1446]
[8]   Highly integrated field emitter arrays fabricated by transfer mold technique [J].
Nakamoto, M ;
Fukuda, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (6A) :3611-3615
[9]   Toward High-Performance Diamond Electronics: Control and Annihilation of Dislocation Propagation by Metal-Assisted Termination [J].
Ohmagari, Shinya ;
Yamada, Hideaki ;
Tsubouchi, Nobuteru ;
Umezawa, Hitoshi ;
Chayahara, Akiyoshi ;
Mokuno, Yoshiaki ;
Takeuchi, Daisuke .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2019, 216 (21)
[10]   Field emitter triode for power switching - A new power device candidate [J].
Ono, T ;
Sakai, T ;
Sakuma, N ;
Nakayama, K ;
Ohashi, H .
ISPSD '98 - PROCEEDINGS OF THE 10TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS, 1998, :151-154