Epitaxial growth and mechanical properties of (001) ZrN/W nanolaminates

被引：12

作者：

Abadias, G. ^{[1
]}

Pailloux, F. ^{[1
]}

Dub, S. N. ^{[2
]}

机构：

[1] Univ Poitiers, CNRS, Met Phys Lab, UMR 6630,SP2MI, F-86962 Futuroscope, France

[2] Natl Acad Sci Ukraine, Inst Superhard Mat, UA-04074 Kiev, Ukraine

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 15期

关键词：

X] epitaxy; X] multilayer; B] hardness; X] stress; D] zirconium nitride; D] tungsten;

D O I：

10.1016/j.surfcoat.2008.01.013

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Epitaxial growth of ZrN/W multilayers with bilayer periods A ranging from 2.5 to 50 nm has been achieved at 300 degrees C on MgO (001) substrates by means of dual ion beam sputtering, which is a novelty compared to polycrystalline growth reported so far in this system. X-ray Diffraction (XRD) and Transmission Electron Microscopy (TEM) experiments reveal the following epitaxial relationship [110] (001) W//[100] (001) ZrN//[100] (001) MgO. Nano indentation tests indicate a hardness increase proportional to Lambda(-0.54), with maximum of 25.8 GPa at Lambda = 2.5 nm. However, there is no hardness enhancement relative to rule-of-mixtures value, which could be ascribed to delamination at the Won ZrN interfaces, as observed by TEM and related to large compressive stress, as determined by XRD. Another explanation could be related to the small difference in shear modulus between the two materials. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：3683 / 3687

页数：5

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