Nanocrystal floating gate memory with solution-processed indium-zinc-tin-oxide channel and colloidal silver nanocrystals

被引:10
|
作者
Hu, Quanli [2 ]
Ha, Sang-Hyub [1 ]
Lee, Hyun Ho [1 ]
Yoon, Tae-Sik [2 ,3 ]
机构
[1] Myongji Univ, Dept Chem Engn, Yongin 449728, Gyeonggi Do, South Korea
[2] Myongji Univ, Dept Nano Sci & Engn, Yongin 449728, Gyeonggi Do, South Korea
[3] Myongji Univ, Dept Mat Sci & Engn, Yongin 449728, Gyeonggi Do, South Korea
基金
新加坡国家研究基金会;
关键词
SEMICONDUCTORS; NANOPARTICLES; TEMPERATURE; SINGLE; LAYER; TFTS;
D O I
10.1088/0268-1242/26/12/125021
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A nanocrystal (NC) floating gate memory with solution-processed indium-zinc-tin-oxide (IZTO) channel and silver (Ag) NCs embedded in thin gate dielectric layer (SiO2(30 nm)/Al2O3(3 nm)) was fabricated. Both the IZTO channel and colloidal Ag NC layers were prepared by spin-coating and subsequent annealing, and dip-coating process, respectively. A threshold voltage shift up to similar to 0.9 V, corresponding to the electron density of 6.5 x 10(11) cm(-2), at gate pulsing <= 10 V was achieved by the charging of high density NCs. These results present the successful non-volatile memory characteristics of an oxide-semiconductor transistor fabricated through solution processes.
引用
收藏
页数:5
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