High diffraction order grating interferometer for pitch measurement

被引：4

作者：

Apostol, Dan ^{[1
]}

Udrea, Cristian ^{[1
]}

Garoi, Florin ^{[1
]}

Vasile, Tiberius ^{[1
]}

Logofatu, Petre Catalin ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Magurele 07725, Ilfov, Romania

来源：

OPTICAL ENGINEERING | 2011年 / 50卷 / 10期

关键词：

grating interferometry; fringe counting; diffraction orders; LATERAL SHEAR; PHASE;

D O I：

10.1117/1.3633332

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A grating interferometer that uses the high diffraction orders in conjunction with a Twyman-Green commercial interferometer is used for the measurement of in plane movement of gratings. The high diffraction orders ensures the amplification of the measurement precision with a factor equal to the diffraction order of the measurement in principle, because no imaging of features marking the beginning and the end of the measured length feature is necessary, and therefore the resolution limits associated with microscope imaging are eliminated. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3633332]

引用

页数：4

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