Photoluminescence and electron-spin-resonance studies of defects in amorphous SiO2 films

被引：0
|
作者：
Nishikawa, H [1 ]
Fukui, H [1 ]
Watanabe, E [1 ]
Ito, D [1 ]
Seol, KS [1 ]
Ohki, Y [1 ]
机构：
[1] Tokyo Metropolitan Univ, Dept Elect Engn, Hachioji, Tokyo 1920397, Japan
来源：
1998 INTERNATIONAL SYMPOSIUM ON ELECTRICAL INSULATING MATERIALS, PROCEEDINGS | 1998年
关键词：
D O I：
10.1109/ISEIM.1998.741684
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：59 / 62
页数：4
相关论文
共 50 条
  • [1] Photoluminescence and electron-spin-resonance studies of defects in amorphous SiO2 films
    Nishikawa, H
    Fukui, H
    Watanabe, E
    Ito, D
    Seol, KS
    Ishii, K
    Ohki, Y
    Takiyama, M
    Tachimori, M
    PHYSICS AND CHEMISTRY OF SIO(2) AND THE SI-SIO(2) INTERFACE-3, 1996, 1996, 96 (01): : 418 - 427
  • [2] Photoluminescence and electron-spin-resonance studies of defects in ion-implanted thermal SiO2 films
    Nishikawa, H
    Fukui, H
    Watanabe, E
    Ito, D
    Takiyama, M
    Ieki, A
    Ohki, Y
    ICDS-18 - PROCEEDINGS OF THE 18TH INTERNATIONAL CONFERENCE ON DEFECTS IN SEMICONDUCTORS, PTS 1-4, 1995, 196- : 97 - 101
  • [3] RAMAN AND ELECTRON-SPIN-RESONANCE STUDIES OF THE THERMAL HISTORY OF AMORPHOUS SIO2
    GALEENER, FL
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 71 (1-3) : 373 - 386
  • [4] ELECTRON-SPIN-RESONANCE OF NO2 TRAPPED IN SIO2 THIN SOLID FILMS
    SCHWARTZ, RN
    CLARK, MD
    CHAMULITRAT, W
    KEVAN, L
    JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) : 3231 - 3234
  • [5] Electron-spin-resonance identification of a -CH2. radical in irradiated amorphous SiO2:OH
    Austin, WR
    Leisure, RG
    PHYSICAL REVIEW B, 1996, 54 (21): : 15064 - 15072
  • [6] LUMINESCENCE AND ELECTRON-SPIN-RESONANCE STUDIES OF DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    STREET, RA
    BIEGELSEN, DK
    SOLID STATE COMMUNICATIONS, 1980, 33 (12) : 1159 - 1162
  • [7] DEFECTS IN SI-BASED FILMS - ELECTRON-SPIN-RESONANCE AND NMR-STUDIES
    SHIMIZU, T
    JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS, 1984, 16 : 21 - 32
  • [8] ELECTRON-SPIN-RESONANCE STUDY OF THE DEFECTS IN POLYCRYSTALLINE DIAMOND FILMS
    KARPUKHINA, TA
    BOUILOV, LL
    CHUYAEV, VF
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) : 538 - 544
  • [9] ELECTRON-SPIN-RESONANCE AND ELECTRON-SPIN ECHO MODULATION SPECTROSCOPIC STUDIES OF MOLYBDENUM ADSORBATE INTERACTIONS ON SUPPORTED MO/SIO2
    NARAYANA, M
    ZHAN, RY
    KEVAN, L
    JOURNAL OF PHYSICAL CHEMISTRY, 1985, 89 (04) : 636 - 641
  • [10] ELECTRON-SPIN-RESONANCE (ELECTRON-SPIN-RESONANCE) STUDIES OF STARCH AND GLUTEN
    PEARCE, LE
    DAVIS, EA
    GORDON, J
    MILLER, WG
    CEREAL FOODS WORLD, 1986, 31 (08) : 604 - 604
12345