Impact of Pulsed Atmospheric-Pressure Glow Discharge on Nanometer-Thick Aluminum Films

被引：0

作者：

Emelyanov, O. A. ^{[1
]}

Plotnikov, A. P. ^{[1
]}

Feklistov, E. G. ^{[1
]}

机构：

[1] Peter Great St Petersburg Polytech Univ, St Petersburg 195251, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2021年 / 47卷 / 03期

关键词：

atmospheric-pressure glow discharge; cold plasma; cathode spot; streamer; PLASMA; CORONA;

D O I：

10.1134/S1063785021030196

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The action of positive pulsed corona discharge in air at atmospheric pressure on aluminum thin-film cathode was studied in a 2- to 8-mm-wide gap at 5- to 15-kV voltage, 10- to 15-kHz pulse repetition rate, and pulse amplitude and duration of 10-20 mA and 300-500 ns, respectively. It has been established that, at relatively small average currents of 20-50 mu A, the corona discharge near cathode transforms into glow discharge. Due to discharge constriction on a transverse 1-mu m scale, the Joule's heating of a cathode layer can reach up to about 1000 K and produce local erosion of the cathode surface. This mechanism should be taken into account in analysis of the effects accompanying the interaction of discharge plasma with biological objects.

引用

页码：271 / 274

页数：4

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