Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

被引：3

作者：

Carter, Richard M. ^{[1
]}

Morrall, Peter ^{[2
]}

Maier, Robert R. J. ^{[1
]}

Jones, Benjamin J. S. ^{[2
]}

McCulloch, Scott ^{[2
]}

Barton, James S. ^{[1
]}

机构：

[1] Heriot Watt Univ, Sch EPS, Dept Phys, Edinburgh EH14 4AS, Midlothian, Scotland

[2] AWE, Aldermaston RG7 4PR, England

来源：

21ST INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS | 2011年 / 7753卷

基金：

英国工程与自然科学研究理事会;

关键词：

sensing; hydrogen; palladium; thin film; PD;

D O I：

10.1117/12.886057

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.

引用

页数：4

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