Vibration-mode analysis of an RF film-bulk-acoustic-wave resonator by using the finite element method

被引：10

作者：

Jung, JH ^{[1
]}

Lee, YH

Lee, JH

Choi, HC

机构：

[1] Elect & Telecommun Res Inst, Mobile Telecommun Res Lab, Taejon 305350, South Korea

[2] Kyungpook Natl Univ, Sch Elect & Elect Engn, Taegu 701702, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2003年 / 43卷 / 05期

关键词：

film bulk acoustic wave resonator; RF; finite element;

D O I：

10.3938/jkps.43.648

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this research, the resonant characteristics and the modes of a film bulk acoustic wave resonator (FBAR) used in the RF frequency region of a few gigahertz was evaluated from its impedance by using a modal analysis with the three-dimensional finite element method. In particular, the spurious characteristics caused by variations in the electrode area, as well as all the resonant modes and the mode shapes, were analyzed. From these results, the optimum ratio of length to thickness for the FBAR. to be fabricated is 20:1, and the minimum ratio to operate the fundamental thickness vibration mode is 5:1.

引用

页码：L648 / L650

页数：3

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