Optical Properties of Vanadium and Nitrogen Doped 4H and 6H-SiC

被引:0
|
作者
Huang, Zhiming [1 ]
Huang, Jingguo [1 ]
Gao, Yanqing [1 ]
Andreev, Yury M. [2 ,3 ,4 ]
Ezhov, Dmitry M. [2 ]
Svetlichnyi, Valery A. [2 ,4 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai, Peoples R China
[2] Tomsk State Univ, Siberian Phys Tech Inst, Tomsk, Russia
[3] RAS, Inst Monitoring Climat & Ecol Syst SB, Tomsk, Russia
[4] RAS, High Current Elect Inst, Tomsk, Russia
基金
俄罗斯科学基金会;
关键词
Silicon Carbide; THz; optical damage threshold; SILICON-CARBIDE; NONLINEAR MATERIAL; CRYSTALS; REGION; FILMS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Linear optical properties of vanadium (V) and nitrogen (N) doped single-crystal sub-millimeter wafers of 4H-SiC and 6H-SiC grown for industrial applications in optics and electronics are studied in detail within transparency window and from 0.2 THz to 2.1 THz range to reveal usability in parametric frequency conversion. Manufactured wafers are found not uniform in polytype composition. Optical properties of majority of wafers indicated applicability for THz wave generation by optical rectification method. The wafers demonstrated large optical damage threshold exceeding that for widely used crystals GaSe at least for from 3 to 5 times and up to 10 times lower (from a few tens to below 1 cm(-1)) absorption coefficient in the THz range. Birefringence of doped 4H-SiC are still close to that for pure crystals, i.e. suitable for phase matched frequency conversion within the transparency window or into the THz region. Polytypc 6H seems suitable for phase matched down-conversion into the THz range. Nevertheless, absolute values of refractive indices are seriously varying wafer to wafer.
引用
收藏
页码:314 / 319
页数:6
相关论文
共 50 条
  • [31] Comparative study of boron doped gate oxide impact on 4H and 6H-SiC n-MOSFETs
    Cabello, Maria
    Soler, Victor
    Knoll, Lars
    Montserrat, Josep
    Rebollo, Jose
    Mihaila, Andrei
    Godignon, Philippe
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 93 : 357 - 359
  • [32] Full band Monte Carlo study of bulk and surface transport properties in 4H and 6H-SiC
    Hjelm, M
    Bertilsson, K
    Nilsson, HE
    APPLIED SURFACE SCIENCE, 2001, 184 (1-4) : 194 - 198
  • [33] Electrical measurement of the vanadium acceptor level in 4H-and 6H-SiC
    Mitchel, William C.
    Mitchell, William D.
    Smith, H. E.
    Zvanut, M. E.
    Lee, Wonwoo
    SILICON CARBIDE 2006 - MATERIALS, PROCESSING AND DEVICES, 2006, 911 : 225 - +
  • [34] Optimization of 2H, 4H and 6H-SiC high speed vertical MESFETs
    Bertilsson, K
    Nilsson, HE
    DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) : 1254 - 1257
  • [35] Monte Carlo simulation of vertical MESFETs in 2H, 4H and 6H-SiC
    Bertilsson, K
    Dubaric, E
    Nilsson, HE
    Hjelm, M
    Petersson, CS
    DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 1283 - 1286
  • [36] The effects of atomic arrangements on mechanical properties of 2H, 3C, 4H and 6H-SiC
    Yang, Bo
    Deng, Qibo
    Su, Yang
    Peng, Xianghe
    Huang, Cheng
    Lee, Alamusi
    Hu, Ning
    COMPUTATIONAL MATERIALS SCIENCE, 2022, 203
  • [37] Carrier lifetime in conductive and vanadium-doped 6H-SiC substrates
    Tamulaitis, G
    Yilmaz, I
    Shur, MS
    Anderson, T
    Gaska, R
    APPLIED PHYSICS LETTERS, 2004, 84 (03) : 335 - 337
  • [38] Room-temperature ferromagnetism of vanadium-doped 6H-SiC
    Lin, Shenghuang
    Chen, Zhiming
    Liang, Peng
    Jiang, Dong
    Xie, Huajie
    CHEMICAL PHYSICS LETTERS, 2010, 496 (1-3) : 56 - 58
  • [39] ON THE COMPENSATION MECHANISM IN HIGH-RESISTIVITY 6H-SIC DOPED WITH VANADIUM
    JENNY, JR
    SKOWRONSKI, M
    MITCHEL, WC
    HOBGOOD, HM
    GLASS, RC
    AUGUSTINE, G
    HOPKINS, RH
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) : 3839 - 3842
  • [40] Magnetic properties of Mn-doped 6H-SiC
    Song, Bo
    Bao, Huiqiang
    Li, Hui
    Lei, Ming
    Jian, Jikang
    Han, Jiecai
    Zhang, Xinghong
    Meng, Songhe
    Wang, Wanyan
    Chen, Xiaolong
    APPLIED PHYSICS LETTERS, 2009, 94 (10)