Optical Properties of Vanadium and Nitrogen Doped 4H and 6H-SiC

被引:0
作者
Huang, Zhiming [1 ]
Huang, Jingguo [1 ]
Gao, Yanqing [1 ]
Andreev, Yury M. [2 ,3 ,4 ]
Ezhov, Dmitry M. [2 ]
Svetlichnyi, Valery A. [2 ,4 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai, Peoples R China
[2] Tomsk State Univ, Siberian Phys Tech Inst, Tomsk, Russia
[3] RAS, Inst Monitoring Climat & Ecol Syst SB, Tomsk, Russia
[4] RAS, High Current Elect Inst, Tomsk, Russia
来源
2017 18TH INTERNATIONAL CONFERENCE OF YOUNG SPECIALISTS ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES (EDM) | 2017年
基金
俄罗斯科学基金会;
关键词
Silicon Carbide; THz; optical damage threshold; SILICON-CARBIDE; NONLINEAR MATERIAL; CRYSTALS; REGION; FILMS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Linear optical properties of vanadium (V) and nitrogen (N) doped single-crystal sub-millimeter wafers of 4H-SiC and 6H-SiC grown for industrial applications in optics and electronics are studied in detail within transparency window and from 0.2 THz to 2.1 THz range to reveal usability in parametric frequency conversion. Manufactured wafers are found not uniform in polytype composition. Optical properties of majority of wafers indicated applicability for THz wave generation by optical rectification method. The wafers demonstrated large optical damage threshold exceeding that for widely used crystals GaSe at least for from 3 to 5 times and up to 10 times lower (from a few tens to below 1 cm(-1)) absorption coefficient in the THz range. Birefringence of doped 4H-SiC are still close to that for pure crystals, i.e. suitable for phase matched frequency conversion within the transparency window or into the THz region. Polytypc 6H seems suitable for phase matched down-conversion into the THz range. Nevertheless, absolute values of refractive indices are seriously varying wafer to wafer.
引用
收藏
页码:314 / 319
页数:6
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