Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements

被引：1

作者：

Bai, Yingying ^{[1
,2
]}

Zhang, Zhiyu ^{[1
]}

Wang, Ruoqiu ^{[1
]}

Chen, Tianbao ^{[1
,2
]}

Wang, Xu ^{[1
]}

Zhang, Xuejun ^{[1
]}

机构：

[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Opt Syst Adv Mfg Technol, Changchun 130033, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

APPLIED SCIENCES-BASEL | 2021年 / 11卷 / 15期

关键词：

computer-generated hologram; optical testing; diffraction optics; OPTIMAL-DESIGN; FABRICATION; SENSITIVITY;

D O I：

10.3390/app11156897

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Computer-generated hologram (CGH) null correctors are used as accuracy standards for interferometric measurements of optical surfaces and optical systems. Diffractive optics calibrators (DOCs) have been developed to evaluate the phase tolerance of CGHs based on scalar approximation by measuring variations in duty cycle and etching depth. However, if the grating period of a CGH < 5 lambda, the scalar approximation is not accurate for phase analysis and reconstruction. In this study, the measurement errors of DOCs with small-period CGHs were investigated and experimentally verified. Results show that the imperfections of scalar approximation in CGHs cannot be ignored and the development of rigorous evaluation methods to improve the measurement accuracy of CGHs is of great practical significance.

引用

页数：12

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