A study on high-speed and high-precision tracking control of large-scale stage using perfect tracking control method based on multirate feedforward control

被引：0

作者：

Saiki, Kazuaki ^{[1
]}

Hara, Atsushi ^{[1
]}

Sakata, Koichi ^{[2
]}

Fujimoto, Hiroshi ^{[2
]}

机构：

[1] Nikon Inc, Sakae Ku, 471 Nagaodai Cho, Yokohama, Kanagawa 2448533, Japan

[2] Yokohama Natl Univ, Yokohama, Kanagawa, Japan

来源：

AMC '08: 10TH INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL, VOLS 1 AND 2, PROCEEDINGS | 2008年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In a control of hard disk drive, perfect tracking control (PTC) method has already gained high performance. Therefore, the first auther and his group study PTC scheme for improving performance of large-scale stages. This paper presents an application of PTC scheme for two-types; tracking stage. We compare performances of PTC method with a conventional method. Finally, the results of simulation and experiment show the advantages of PTC method which provides high performance.

引用

页码：206 / +

页数：2

共 4 条

[1] Perfect tracking control based on multirate feedforward control with generalized sampling periods [J].

Fujimoto, H ;

Hori, Y ;

Kawamura, A .

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2001, 48 (03) :636-644

[2]

FUJIMOTO H, 2006, P AM CONTR C MINN JU

[3]

FUKUSHIMA K, 2007, P SICE C

[4] Improvement of fast and precise positioning of large-scale high-precision step-stage based on vibration suppression PTC [J].

Sakata, Koichi ;

Fujimoto, Hiroshi ;

Shimoyama, Takachika ;

Saiki, Kazuaki .

IECON 2007: 33RD ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-3, CONFERENCE PROCEEDINGS, 2007, :339-+

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