Wave stimulated phenomena in inductively coupled magnetized plasmas

Linear and nonlinear wave phenomena and their influence on the discharge performance are considered in the helicon plasma (HP) and magnetized inductively coupled plasma (MICP). Magnetic field configuration is shown to result in strong variation in the efficiency of plasma production caused by alterations of the character of wave processes rather than by the particle confinement. Effects of magnetic configuration are found to be dominant in operation of the compact HP with permanent magnet. Low frequency turbulence in the megahertz range is revealed to be inherent for both the HP and MICP and to depend strongly on the magnetic configuration. Enhanced axial electric field arising in front of the metal end plate in the HP is argued to be a potential source of the nonlinear effects.