A 5-μm-thick SOI waveguide with low birefringence and low roughness and optical interconnection using high numerical aperture fiber

被引：6

作者：

Hsu, Shih-Hsiang ^{[1
]}

机构：

[1] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei 10607, Taiwan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2008年 / 20卷 / 9-12期

关键词：

optical waveguides; optical waveguide components; optoelectronic devices;

D O I：

10.1109/LPT.2008.923754

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 5-mu m-thick silicon-on-insulator waveguide possessing low birefringence of 5.8 x 10(-5) and 9-nm lithography roughness is investigated using arrayed waveguide grating and an atomic force microscope. Instead of complex processing using a 3-D mode size converter, the high numerical aperture fiber is utilized as the bridge between the corresponding waveguide and single-mode fiber (SMIT-28) to obtain a competitive coupling loss of 0.4 dB.

引用

页码：1003 / 1005

页数：3

共 6 条

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