Low-insertion-loss compact 3D-mems optical matrix switch with 18 input/output ports

This paper describes a new three-dimensional (3D) MEMS optical switch. The switch consists of a collimator array for generating optical beams, and a MEMS mirror array for changing the directions of the beams. Each of the 18 optical ports can be either an input or an output, giving the switch a flexible configuration of 8 x 8, 2 x 16 and so on. The mirrors and the collimators are assembled passively in a compact package measuring 80 x 30 x 12 mm. The mean of measured insertion losses of all 64 paths in an 8 x 8 switch configuration was 1.1 dB; this confirms the low insertion loss of the developed switch.