Study on Properties of Fully Etched Bragg Grating Waveguide Filters

A fully etched Bragg grating filter based on Silicon-On-Insulator(SOI)waveguide is proposed. The full-etched feature makesthe tuning on Bragg wavelength more sensitive and efficient,which can be fabricated by one-step top silicon etching. The simulation results show that the wavelength-period tuning coefficient of 33 nm/nm and 11 nm/nm for the first- and third-order gratings are obtained respectively, groove refractive index tuning has a coefficient of 1 nm/0.006. Combining low refractive index contrast of grating bar and groove with higher grating order,the full-etched grating filter with a narrower bandwidth at 1 550 nm band can be realized.