Sputter deposition of Mo-alumina cermet solar selective coatings: Interrelation between residual oxygen incorporation, structure and optical properties

Mo/alumina cermet-based selective coatings are of great interest for concentrated solar-thermal power systems, in particular, parabolic trough collectors. We report on the sputter deposition of high-performance multilayer Mo/alumina cermet coatings on stainless steel with a solar absorptance of 94% and a thermal emittance of 8% (at 400 degrees C), and excellent thermal stability. The selective coatings were deposited in a 0.95 m(3) sputtering chamber in order to correlate the deposition parameters, such as presence of residual gases, deposition power, and sputtering method (DC or RF), with the coating composition and the resulting optical properties. X-ray photoelectron spectroscopy, x-ray diffraction, and Raman spectroscopy have been applied to quantitatively describe the effect of residual oxygen on the distribution of oxidation states of Mo in the metallic infrared reflector layer, the high and low metallic volume fraction cermet layers, as well as the composition of the alumina top layer. The results provide strategies to obtain optimal selective coatings under conditions where residual oxygen cannot be avoided, which are essential for a successful transition from a laboratory to pre-industrial scale of vacuum deposition systems.