Tracking control of a piezoelectric actuator based on experiment hysteretic modeling

被引：8

作者：

Huang, YC ^{[1
]}

Lin, DY ^{[1
]}

机构：

[1] Natl Changhua Univ Educ, Changhua 500, Taiwan

来源：

PROCEEDINGS OF THE 2003 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM 2003), VOLS 1 AND 2 | 2003年

关键词：

D O I：

10.1109/AIM.2003.1225113

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

Micro positioning systems using piezoelectric stack actuator (PEA) have a very wide range of applications including ultra-precision machine tools, diamond turning machines and motion stage with flexure hinge structure mechanism design. These positioning responses comprise with hysteretic behavior when voltage is actuated. The tracking control accuracy of PEA is therefore limited due to their inherent hysteresis nonlinearity. The dynamics of the PEA modeling in positioning available in literatures were revisited, compared and discussed with incorporating simulated and experimental implementations in this paper. This paper presents a new computer-based tracking control approach for PEA by facilitating a feedforward open loop control based on hysteretic modeling from experiments. Simulations and experiments on tracking control of several sinusoidal waveform of input frequency shows that the root mean square tracking error can be reduced to be less than 2% of the maximum traveling path.

引用

页码：308 / 313

页数：6

共 10 条

[1] Modeling piezoelectric actuators [J].