Application of ERDA method to study hydrogen and helium in Ti, Zr and Nb membranes

Hydrogen and helium behavior in Ti, Zr and Nb membranes of several mu m thickness was investigated by Elastic Recoil Detection Analysis (ERDA) using 6 MeV O and 12 MeV C beams in the transmission geometry. The concentration depth profiles of H and He during the He-4 implantation were simultaneously measured in the membranes containing uniformly distributed H of about 0.1 at.%. During the He-4 implantation into Ti, Zr and Nb membranes, an enrichment of the H concentration was observed at the depth corresponding to the range of the implanted He-4 ions. In the Nb membrane, a reversible change of the H profile was observed on heating and cooling runs. The trapping energy of H in defects created by 10 keV He-4 implantation in the Nb membrane was estimated to be 0.14 +/- 0.03 eV from the change in H concentration on cooling after the He-4 implantation at 500 K. (C) 1998 Elsevier Science B.V.