Electrodeposition of Diamond-Like Carbon Thin Film on Conductive Indium-Tin-Oxide Glass Substrate

被引：0

作者：

Chang, Ching-Tsang ^{[1
]}

Chang, Yi-Tsung ^{[1
]}

Chih, Yun-Jhung ^{[1
]}

Ueng, Herng-Yih ^{[1
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Elect Engn, 70 Lianhai Rd, Kaohsiung 80424, Taiwan

来源：

2015 International Symposium on Next-Generation Electronics (ISNE) | 2015年

关键词：

electrodeposition; diamond-like carbon; anti-reflective layer; indium tin oxide; DLC FILMS; ELECTROLYSIS; DEPOSITION; PECVD; PHASE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents electrodeposition of diamond-like carbon (DLC) thin film deposits on indium tin oxide (ITO) glass substrate under voltage 2.1V similar to 120V with mixing varying acetic acids' portions with deionized water, forming 0.2 similar to 0.8% electrolytic solutions. The result shows that at deposition temperature 30 degrees C similar to 65 degrees C,voltage 50V and 0.8% electrolytic solution concentration of DLC thin films, the reflection index reduced to 60%, and theoretical matching refractive index became 1.32. This finding is applicable on various optoelectronic device like protective or window layer of solar cell.

引用

页数：3

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