Evaluation of the Nanofabrication and Corrosion on Copper by In-situ ECAFM

This study used the Electrochemical Atomic Force Microscopy (ECAFM) in Contact Mode to discuss the nanofabrication and corrosion of pure Cu in an environment with DI water and applied voltage. It also observed the morphological changes of nanometric surfaces of pure Cu. The results showed that in the environment of DI water and applied voltage, the silicon probe of ECAFM would have a nanometric cutting effect at an early stage on a pure Cu surface, thus producing a visible hole. However, such cutting effects would be diminished with time when electrochemical machining is prolonged, due to oxidation effects. If the EC-AFM probe does not continuously scan the pure Cu surface areas, the protrusions on the surface would extend due to oxidation.