Timed Petri nets in modeling and analysis of cluster tools

被引：139

作者：

Zuberek, WM ^{[1
]}

机构：

[1] Mem Univ Newfoundland, Dept Comp Sci, St Johns, NF A1B 3X5, Canada

来源：

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION | 2001年 / 17卷 / 05期

基金：

加拿大自然科学与工程研究理事会;

关键词：

cluster tools; net transformations; performance analysis; place invariants; steady-state behavior; structural analysis; timed Petri nets; transient behavior;

D O I：

10.1109/70.964658

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Timed Petri nets are used as models of cluster tools representing the flow of wafers through the chambers of the tool as well as sequences of actions performed by the robotic transporter. Since the durations of all activities are also represented in the model, performance characteristics can be derived from the model for steady-state, as well as transient behaviors. The performance of single-blade tools is compared with that of dual-blade tools. The effects of multiple loadlocks, redundant chambers and multiple robots are discussed and analyzed. Modeling of wafer routings with chamber revisiting and processing of wafers of multiple types is also briefly discussed.

引用

页码：562 / 575

页数：14

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