Influence non-uniform strain on characteristics of one-port saw resonators

被引：0

作者：

Kalinin, V ^{[1
]}

Leigh, A ^{[1
]}

机构：

[1] Transense Technol Plc, Bicester OX25 5HD, Oxon, England

来源：

2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A one-port SAW resonator with a non-uniformly strained substrate is studied both experimentally and theoretically. Apart from the expected variation of the resonant frequency due to static strain and a noticeable variation of the resonant value of S(11) the emergence of a parasitic mode is also observed. Modelling explains this phenomenon and helps to predict a reduction of the sensitivity to strain due to its non-uniformity.

引用

页码：1412 / 1415

页数：4

共 8 条

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