Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD

被引：42

作者：

Zakharov, Dmitry ^{[1
]}

Lebedev, Gor ^{[1
]}

Irzhak, Artemy ^{[1
]}

Afonina, Veronika ^{[2
]}

Mashirov, Alexey ^{[2
]}

Kalashnikov, Vladimir ^{[2
]}

Koledov, Viktor ^{[2
]}

Shelyakov, Alexander ^{[3
]}

Podgorny, Dmitry ^{[1
]}

Tabachkova, Natalia ^{[1
]}

Shavrov, Vladimir ^{[2
]}

机构：

[1] Natl Res Univ Sci & Technol MISiS, Moscow 119049, Russia

[2] Russian Acad Sci, Kotelnikov Inst Radioengn & Elect, Moscow 125009, Russia

[3] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia

来源：

SMART MATERIALS AND STRUCTURES | 2012年 / 21卷 / 05期

关键词：

BEHAVIOR; ALLOYS;

D O I：

10.1088/0964-1726/21/5/052001

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An enhanced scheme for a functional bilayered composite material with shape memory effect has been successfully applied on the microscale to fabricate a thermally controlled microactuator. Fabrication of cantilever-type microactuators from melt spun ribbon of TiNiCu shape memory alloy included electro-chemical polishing followed by focused ion beam milling and ion-assisted chemical vapor deposition of Pt elastic layer. The smallest working microactuator had a volume of 0.9 mu m(3). The structure and thermal stability of the Pt layer have been investigated. The fabricated actuator has been proposed for use as micromechanical nanotweezers for manipulation of submicron- and nano-sized objects. Manipulation of a carbon nanotube bunch has been demonstrated.

引用

页数：8

共 22 条

[1]

[Anonymous], 2009, Thin film shape memory alloys fundamentals and device applications

[2]

Boyer R, 1994, MAT PROPERTIES HDB T, P1150

[3] Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition [J].

Chang, Jiyoung ;

Min, Byung-Kwon ;

Kim, Jongbaeg ;

Lin, Liwei .

MICROELECTRONIC ENGINEERING, 2009, 86 (11) :2364-2368

[4] Size Independent Shape Memory Behavior of Nickel-Titanium [J].

Clark, Blythe G. ;

Gianola, Daniel S. ;

Kraft, Oliver ;

Frick, Carl P. .

ADVANCED ENGINEERING MATERIALS, 2010, 12 (08) :808-815

[5] On the lower thickness boundary of sputtered TiNi films for shape memory application [J].

Fu, Y. Q. ;

Zhang, Sam ;

Wu, M. J. ;

Huang, W. M. ;

Du, H. J. ;

Luo, J. K. ;

Flewitt, A. J. ;

Milne, W. I. .

THIN SOLID FILMS, 2006, 515 (01) :80-86

[6] A shape memory microcage of TiNi/DLC films for biological applications [J].

Fu, Y. Q. ;

Luo, J. K. ;

Ong, S. E. ;

Zhang, S. ;

Flewitt, A. J. ;

Milne, W. I. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (03)

[7]

Giannuzzi L. A., 2005, Introduction to focused ion beams: instrumentation, theory, techniques and practice

[8] Actuators based on composite material with shape-memory effect [J].

Irzhak, A. V. ;

Zakharov, D. I. ;

Kalashnikov, V. S. ;

Koledov, V. V. ;

Kuchin, D. S. ;

Lebedev, G. A. ;

Lega, P. V. ;

Perov, E. P. ;

Pikhtin, N. A. ;

Pushin, V. G. ;

Tarasov, I. S. ;

Khovailo, V. V. ;

Shavrov, V. G. ;

Shelyakov, A. V. .

JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2010, 55 (07) :818-830

[9] Thickness effect on shape memory behavior of Ti-50.0at.%Ni thin film [J].

Ishida, A ;

Sato, M .

ACTA MATERIALIA, 2003, 51 (18) :5571-5578

[10]

Lagoudas D.C., 2008, Shape Memory Alloys

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