CRYSTAL TEXTURE AND MECHANICAL STRESSES IN VO2 FILMS OBTAINED BY MOCVD

被引：1

作者：

Shayapov, V. R. ^{[1
]}

Kichai, V. N. ^{[1
]}

Yakovkina, L. V. ^{[1
]}

Korolkov, I. V. ^{[1
,2
]}

机构：

[1] Russian Acad Sci, Nikolaev Inst Inorgan Chem, Siberian Branch, Novosibirsk, Russia

[2] Kemerovo State Univ, Kemerovo, Russia

来源：

JOURNAL OF STRUCTURAL CHEMISTRY | 2022年 / 63卷 / 02期

关键词：

vanadium dioxide; thin films; mechanical stresses; texture; vanadyl acetylacetonate; METAL-INSULATOR-TRANSITION; VANADIUM DIOXIDE FILMS; THERMAL-EXPANSION; PHASE-TRANSITION;

D O I：

10.1134/S0022476622020044

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The texture of crystallites and mechanical stresses are investigated in polycrystalline VO2 films obtained by MOCVD from vanadyl acetylacetonate vapor at deposition temperatures from 380 degrees C to 590 degrees C. The films are deposited on single crystal silicon and quartz glass substrates. It is found that with increasing deposition temperature in this range the main crystallographic orientation of crystallites in the films changes twice. All films experience tensile stresses. Mechanical stresses reach maximum values within the deposition temperature range, which is caused by characteristic changes in the texture of film crystallites.

引用

页码：235 / 241

页数：7

共 29 条

[1] RESISTIVITY OF THE HIGH-TEMPERATURE METALLIC PHASE OF VO2 [J].

ALLEN, PB ;

WENTZCOVITCH, RM ;

SCHULZ, WW ;

CANFIELD, PC .

PHYSICAL REVIEW B, 1993, 48 (07) :4359-4363

[2] Electrical conductivity of the semiconducting phase in vanadium dioxide single crystals [J].

Andreev, V. N. ;

Klimov, V. A. .

PHYSICS OF THE SOLID STATE, 2007, 49 (12) :2251-2255

[3]

[Anonymous], 2010, Powder Diffraction File database

[4] Size effects on stress relaxation across the metal-insulator transition in VO2 thin films [J].

Balakrishnan, Viswanath ;

Ko, Changhyun ;

Ramanathan, Shriram .

JOURNAL OF MATERIALS RESEARCH, 2011, 26 (11) :1384-1387

[5] Extended Mapping and Exploration of the Vanadium Dioxide Stress-Temperature Phase Diagram [J].

Cao, J. ;

Gu, Y. ;

Fan, W. ;

Chen, L. Q. ;

Ogletree, D. F. ;

Chen, K. ;

Tamura, N. ;

Kunz, M. ;

Barrett, C. ;

Seidel, J. ;

Wu, J. .

NANO LETTERS, 2010, 10 (07) :2667-2673

[6] Colossal thermal-mechanical actuation via phase transition in single-crystal VO2 microcantilevers [J].

Cao, Jinbo ;

Fan, Wen ;

Zhou, Qin ;

Sheu, Erica ;

Liu, Aiwen ;

Barrett, C. ;

Wu, J. .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (08)

[7] Vanadium oxide thin films deposited on silicon dioxide buffer layers by magnetron sputtering [J].

Chen, SH ;

Ma, H ;

Wang, SB ;

Shen, N ;

Xiao, J ;

Zhou, H ;

Zhao, XM ;

Li, Y ;

Yi, XJ .

THIN SOLID FILMS, 2006, 497 (1-2) :267-269

[8] Synthesis of vanadium dioxide thin films and nanostructures [J].

Devthade, Vidyasagar ;

Lee, Sangwook .

JOURNAL OF APPLIED PHYSICS, 2020, 128 (23)

[9] Nanomechanical actuation from phase transitions in individual VO2 micro-beams [J].

Guo, Hua ;

Wang, Kevin ;

Deng, Yu ;

Oh, Y. ;

Asif, S. A. Syed ;

Warren, O. L. ;

Shan, Z. W. ;

Wu, J. ;

Minor, A. M. .

APPLIED PHYSICS LETTERS, 2013, 102 (23)

[10] Characterization of thermochromic VO2 (prepared at 250°C) in a wide temperature range by spectroscopic ellipsometry [J].

Houska, J. ;

Kolenaty, D. ;

Rezek, J. ;

Vlcek, J. .

APPLIED SURFACE SCIENCE, 2017, 421 :529-534

← 1 2 3 →