High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process

被引：54

作者：

Marsili, F. ^{[1
]}

Bitauld, D. ^{[1
]}

Fiore, A. ^{[1
]}

Gaggero, A. ^{[2
]}

Mattioli, F. ^{[2
]}

Leoni, R. ^{[2
]}

Benkahoul, M. ^{[3
]}

Levy, F. ^{[3
]}

机构：

[1] Ecole Polytech Fed Lausanne, IPEQ, CH-1015 Lausanne, Switzerland

[2] CNR, IFN, I-00156 Rome, Italy

[3] Ecole Polytech Fed Lausanne, IPMC, CH-1015 Lausanne, Switzerland

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 05期

关键词：

D O I：

10.1364/OE.16.003191

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C. SSPDs were fabricated on high quality NbN films of different thickness (7 to 3nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300nm. (c) 2008 Optical Society of America.

引用

页码：3191 / 3196

页数：6

共 14 条

[1] PROPERTIES OF NBN THIN-FILMS DEPOSITED ON AMBIENT-TEMPERATURE SUBSTRATES [J].

BACON, DD ;

ENGLISH, AT ;

NAKAHARA, S ;

PETERS, FG ;

SCHREIBER, H ;

SINCLAIR, WR ;

VANDOVER, RB .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6509-6516

[2] Structural and mechanical properties of sputtered cubic and hexagonal NbNx thin films [J].

Benkahoul, M ;

Martinez, E ;

Karimi, A ;

Sanjinés, R ;

Lévy, F .

SURFACE & COATINGS TECHNOLOGY, 2004, 180 :178-183

[3] Picosecond superconducting single-photon optical detector [J].

Gol'tsman, GN ;

Okunev, O ;

Chulkova, G ;

Lipatov, A ;

Semenov, A ;

Smirnov, K ;

Voronov, B ;

Dzardanov, A ;

Williams, C ;

Sobolewski, R .

APPLIED PHYSICS LETTERS, 2001, 79 (06) :705-707

[4] ARSENIC-FREE GAAS SUBSTRATE PREPARATION AND DIRECT GROWTH OF GAAS/ALGAAS MULTIPLE-QUANTUM-WELL WITHOUT BUFFER LAYER [J].

IIZUKA, K ;

MATSUMARU, K ;

SUZUKI, T ;

HIROSE, H ;

SUZUKI, K ;

OKAMOTO, H .

JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) :13-17

[5] SOME PROPERTIES OF GRANULAR THIN-FILMS OF HIGH-FIELD SUPERCONDUCTORS [J].

JONES, HC .

APPLIED PHYSICS LETTERS, 1975, 27 (08) :471-473

[6] Quantum efficiency and noise equivalent power of nanostructured, NbN, single-photon detectors in the wavelength range from visible to infrared [J].

Korneev, A ;

Matvienko, V ;

Minaeva, O ;

Milostnaya, I ;

Rubtsova, I ;

Chulkova, G ;

Smirnov, K ;

Voronov, V ;

Gol'tsman, G ;

Slysz, W ;

Pearlman, A ;

Verevkin, A ;

Sobolewski, R .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2005, 15 (02) :571-574

[7] Electrical characterization of superconducting single-photon detectors [J].

Mattioli, F. ;

Leoni, R. ;

Gaggero, A. ;

Castellano, M. G. ;

Carelli, P. ;

Marsili, F. ;

Fiore, A. .

JOURNAL OF APPLIED PHYSICS, 2007, 101 (05)

[8] NbN superconducting single-photon detectors prepared on single-crystal MgO substrates [J].

Miki, Shigehito ;

Fujiwara, Mikio ;

Sasaki, Masahide ;

Wang, Zhen .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2007, 17 (02) :285-288

[9] Demonstration of a low-noise near-infrared photon counter with multiphoton discrimination [J].

Miller, AJ ;

Nam, SW ;

Martinis, JM ;

Sergienko, AV .

APPLIED PHYSICS LETTERS, 2003, 83 (04) :791-793

[10] Nanowire Single-photon detector with an integrated optical cavity and anti- reflection coating [J].

Rosfjord, KM ;

Yang, JKW ;

Dauler, EA ;

Kerman, AJ ;

Anant, V ;

Voronov, BM ;

Gol'tsman, GN ;

Berggren, KK .

OPTICS EXPRESS, 2006, 14 (02) :527-534

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