Ferromagnetic resonance probed annealing effects on magnetic anisotropy of perpendicular CoFeB/MgO bilayer

被引：12
作者：
Chen, Y. S. [1 ,2 ]
Cheng, Chih-Wei [3 ]
Chern, G. [3 ]
Wu, W. F. [2 ]
Lin, J. G. [1 ]
机构：
[1] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10617, Taiwan
[2] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan
[3] Natl Chung Cheng Univ, Dept Phys, Chiayi 621, Taiwan
来源：
JOURNAL OF APPLIED PHYSICS | 2012年 / 111卷 / 07期
关键词：
FILMS;
D O I：
10.1063/1.3670042
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The annealing effects of perpendicular MgO/CoFeB/Ta structure are investigated with ferromagnetic resonance technique. The data of angular dependent resonance field, linewidth, and intensity are obtained for both as-grown and annealed samples. An increment of magnetic out-of-plane anisotropy field from 1800 to 3300 Oe with annealing is observed, which should be related to the improvement of crystalline at the interface. Ferromagnetic resonance linewidth significantly broadens after annealing, and this broadening is attributed to the enhancement of inhomogeneity of the internal field. (C) 2012 American Institute of Physics. [doi:10.1063/1.3670042]
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