Dielectric properties of Zr, ZrN, Zr3N4, and ZrO2 determined by quantitative analysis of electron energy loss spectra

被引：54

作者：

Prieto, P ^{[1
]}

Yubero, F ^{[1
]}

Elizalde, E ^{[1
]}

Sanz, JM ^{[1
]}

机构：

[1] CTR UNIV PARIS SUD,UTILISAT RAYONNEMENT ELECTROMAGNET LAB,F-91405 ORSAY,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 06期

关键词：

D O I：

10.1116/1.580210

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The dielectric properties of Zr, ZrN, Zr3N4, and ZrO2 in the energy range from 1 to 80 eV were determined by quantitative analysis of electron energy loss spectroscopy in the reflection mode (REELS) using a recently proposed model. Collective excitations and electronic transitions are well characterized in the REELS spectra after analysis of the respective energy loss function, real and imaginary parts of the dielectric constant, and the optical joint density of states for the four compounds studied here. (C) 1996 American Vacuum Society.

引用

页码：3181 / 3188

页数：8

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