In situ observation of composition profiles in the solution by X-ray penetration method

被引:10
作者
Hayakawa, Yasuhiro [1 ]
Hikida, Takuya [1 ]
Morii, Hisashi [1 ]
Konno, Akiko [1 ]
Chen, Chung-Hao [1 ]
Arafune, Kouji [1 ]
Kawai, Hideki [1 ]
Koyama, Tadanobu [1 ]
Momose, Yoshimi [1 ]
Ozawa, Tetsuo [2 ]
Aoki, Toru [1 ]
机构
[1] Shizuoka Univ, Res Inst Elect, Naka Ku, Hamamatsu, Shizuoka 4328011, Japan
[2] Shizuoka Inst Sci & Technol, Dept Elect Engn, Shizuoka 4378555, Japan
关键词
mass transfer; growth from solutions; gallium compounds; semiconducting III-V materials;
D O I
10.1016/j.jcrysgro.2007.12.010
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The X-ray penetration intensity during the diffusion process of NH4Br into H2O was measured by a CdTe line sensor as a function of time and it was converted to the NH4Br composition using a calibration line. The diffusion coefficient of (NHBr)-Br-4 into H2O was estimated to be 2.2 x 10(-5) cm(2)/s by comparing the calculated results. The method was applied to the growth of InGaSb from the In-Ga-Sb solution. The indium composition profiles in the solution were measured and growth of InGaSb from the In-Ga-Sb solution was observed from the change of X-ray intensity. The growth region of InGaSb crystal was confirmed by the electron probe microanalysis. It was demonstrated that the X-ray penetration method was a powerful method to measure the composition profiles in the solution. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:1487 / 1492
页数:6
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