Fatigue testing of polysilicon - a review

被引：60

作者：

Sharpe, WN ^{[1
]}

Bagdahn, J ^{[1
]}

机构：

[1] Johns Hopkins Univ, Dept Engn Mech, Baltimore, MD 21218 USA

来源：

MECHANICS OF MATERIALS | 2004年 / 36卷 / 1-2期

关键词：

D O I：

10.1016/S0167-6636(03)00027-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Measurement of the mechanical properties of thin-film materials such as polysilicon is difficult because of the small sizes, forces, and displacements involved as well as the need for special techniques to prepare and handle the specimens. The situation is even more difficult when cyclic loading is involved, and this paper reviews the limited number of fatigue studies to date. New tension-tension test methods are presented along with some initial data. All of these measurements show an increase in life of polysilicon with decreasing applied cyclic stress. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：3 / 11

页数：9

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