A novel integrated micromachined tunable laser using polysilicon 3-D mirror

被引：39
作者：
Liu, AQ [1 ]
Zhang, XM
Murukeshan, VM
Lam, YL
机构：
[1] Nanyang Technol Univ, Sch Elect & Elect, Singapore 639798, Singapore
[2] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2001年 / 13卷 / 05期
关键词：
external cavity laser diode; optical MEMS; tunable laser; WDM;
D O I：
10.1109/68.920739
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A prototype tunable laser of similar to2 mm x 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application, This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning, A wavelength-tunable range of 16 nm is obtained using a driving voltage within +/-3 V at a bias voltage of 10 V.
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页码：427 / 429
页数：3
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