Relation Between Low-Frequency Noise and Subgap Density of States in Amorphous InGaZnO Thin-Film Transistors

被引:30
作者
Kim, Sungchul [1 ]
Jeon, Yongwoo [1 ]
Lee, Je-Hun [2 ]
Ahn, Byung Du [2 ]
Park, Sei Yong [2 ]
Park, Jun-Hyun [2 ]
Kim, Joo Han [2 ]
Park, Jaewoo [2 ]
Kim, Dong Myong [1 ]
Kim, Dae Hwan [1 ]
机构
[1] Kookmin Univ, Sch Elect Engn, Seoul 136702, South Korea
[2] Samsung Elect, LCD R&D Ctr, Yongin 449711, South Korea
关键词
Amorphous oxide thin-film transistor (TFT); density of states (DOS); InGaZnO; low-frequency noise (LFN);
D O I
10.1109/LED.2010.2061216
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The relation between the low-frequency noise (LFN) and subgap density of states (DOS) of amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is investigated by changing the postannealing temperature from 150 degrees C to 300 degrees C. It is found that the density of the tail states in the TFT annealed at 300 degrees C (showing the lowest LFN) is prominently lower than those in the TFTs annealed at 250 degrees C and 150 degrees C. The densities of the tail states in the TFTs annealed at 250 degrees C and 150 degrees C (indicating similar LFN) are almost the same. In addition, it is clearly observed that the increased DOS of the a-IGZO TFT subjected to ac gate voltage stress results in a higher LFN compared with one without electrical stress. Hooge's parameters alpha H 's are extracted to be similar to 4.5 x 10 (3) (for the TFT annealed at 300 degrees C) and similar to 1 x 10 (2) (for the TFTs annealed at 250 degrees C and 150 degrees C as well as for the TFT annealed at 300 degrees C after the application of electrical ac stress). Therefore, the role of an a-IGZO subgap DOS on a LFN characteristic seems to be originated from the generation-recombination noise-induced carrier number fluctuation (via trap centers in the DOS tail states) while its correlation with the carrier mobility fluctuation is not clear except for the slope close to -1 in the logarithmic curve with the normalized power spectral density versus the gate overdrive voltage.
引用
收藏
页码:1236 / 1238
页数:3
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