Effects of negative bias voltage on structure and mechanical properties of DLC films synthesized by FCVA deposition

被引：7

作者：

Wen, F. ^{[1
]}

Huang, N. ^{[2
]}

Sun, H. ^{[2
]}

Cao, Y. ^{[1
]}

机构：

[1] Hainan Univ, Key Lab, Minist Educ Applicat Technol Chem Mat Hainan Supe, Sch Mat & Chem Engn, Haikou 570228, Peoples R China

[2] Southwest Jiao Tong Univ, Sch Mat Sci & Engn, Chinese Educ Minist, Key Lab Adv Mat Proc, Chengdu 610031, Peoples R China

来源：

APPLICATIONS OF ENGINEERING MATERIALS, PTS 1-4 | 2011年 / 287-290卷

关键词：

DLC films; wear resistant; bias voltage; Raman; XPS; DIAMOND-LIKE CARBON; COATINGS;

D O I：

10.4028/www.scientific.net/AMR.287-290.2203

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films have been given great attention in the last twenty years and applied in many fields due to its super mechanical property. In this paper, DLC films were prepared by filter cathodic vacuum arc (FCVA) deposition under different negative bias voltage. No spalling was found in all of as-prepared DLC films. X-ray photoelectron spectroscopy (XPS), Raman spectra were employed to analyze composition and structure, the results showed that as-prepared DLC films had tendency of graphite with increase of negative bias voltage. Mechanical properties were characterized by micro-hardness and pin-on disc tests, the results showed that the hardness of DLC films decreased with bias voltage, but still kept good wear resistant.

引用

页码：2203 / +

页数：2

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