Structural and optical characterization of size controlled silicon nanocrystals in SiO2/SiOxNy multilayers

被引:16
作者
Lopez-Vidrier, J. [1 ]
Hernandez, S. [1 ]
Hartel, A. M. [2 ]
Hiller, D. [2 ]
Gutsch, S. [2 ]
Loeper, P. [2 ,3 ]
Lopez-Conesa, L. [1 ]
Estrade, S. [1 ]
Peiro, F. [1 ]
Zacharias, M. [2 ]
Garrido, B. [1 ]
机构
[1] Univ Barcelona, Dept Elect, MIND, Marti i Franques 1, E-08028 Barcelona, Spain
[2] Univ Freiburg, Fac Engn, IMTEK, D-79110 Freiburg, Germany
[3] Fraunhofer Inst Solar Energy Syst, ISE, D-79110 Freiburg, Germany
来源
EUROPEAN MATERIALS RESEARCH SOCIETY CONFERENCE SYMPOSIUM: ADVANCED INORGANIC MATERIALS AND CONCEPTS FOR PHOTOVOLTAICS | 2011年 / 10卷
关键词
Silicon Nanocrystals; Oxynitride; EFTEM; Raman Scattering; Photoluminescence; QUANTUM CONFINEMENT;
D O I
10.1016/j.egypro.2011.10.150
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We offer a complete structural and optical study of samples containing silicon nanocrystals (Si-NCs) embedded in SiO2/SiON multilayers, varying the oxynitride layer thickness from 2.5 to 7 nm. Using energy-filtered transmission electron microscopy we have determined the size distribution of the precipitated Si-nanoaggregates. Raman scattering measurements were used to investigate the Si-NC size and crystalline quality. By combining both techniques, the nanoaggregate crystalline degree has been evaluated, with values around 50% for all the samples. Photoluminescence spectroscopy has shown a blueshift of the emission at smaller NC sizes, presenting the sample with Si-NCs of 3.9 nm the best emission properties. (C) 2011 Published by Elsevier Ltd. Selection and/or peer-review under responsibility of the Organizers of European Materials Research Society (EMRS) Conference: Symposium on Advanced Inorganic Materials and Concepts for Photovoltaics.
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页数:6
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