Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN

被引：2

作者：

Nishikawa, M. ^{[1
]}

Sawai, K. ^{[1
]}

Sakai, K. ^{[1
]}

Kirigane, N. ^{[1
]}

Ohnishi, K. ^{[2
]}

Nakano, W. ^{[2
]}

Matsuo, Y. ^{[2
]}

Shibata, H. ^{[1
]}

机构：

[1] Kitami Inst Technol, Dept Elect & Elect Engn, Kitami, Hokkaido 0908507, Japan

[2] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 0010021, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2022年 / 32卷 / 04期

关键词：

Absorption; Substrates; Timing jitter; Photonics; Silicon; Optical device fabrication; Optical variables control; Superconducting photodetectors; SNSPD; SSPD; molybdenum nitride; LOW-FILLING-FACTOR; EFFICIENCY;

D O I：

10.1109/TASC.2022.3144967

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline gamma-Mo2N films with a T-c about 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD.

引用

页数：4

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