High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

被引：115

作者：

Ehiasarian, A. P. ^{[1
]}

Hecimovic, A. ^{[2
]}

de los Arcos, T. ^{[2
]}

New, R. ^{[1
]}

Schulz-von der Gathen, V. ^{[2
]}

Boeke, M. ^{[2
]}

Winter, J. ^{[2
]}

机构：

[1] Sheffield Hallam Univ, HIPIMS Technol Ctr, Sheffield S1 1WB, S Yorkshire, England

[2] Ruhr Univ Bochum, Inst Expt Phys 2, Bochum, Germany

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 11期

关键词：

OSCILLATIONS;

D O I：

10.1063/1.3692172

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on instabilities in high power impulse magnetron sputtering plasmas which are likely to be of the generalized drift wave type. They are characterized by well defined regions of high and low plasma emissivity along the racetrack of the magnetron and cause periodic shifts in floating potential. The azimuthal mode number in depends on plasma current, plasma density, and gas pressure. The structures rotate in (E) over right arrow x (B) over right arrow direction at velocities of similar to 10 km s(-1) frequencies up to 200 kHz. Collisions with residual gas atoms slow down the rotating wave, whereas increasing ionization degree of the gas and plasma conductivity speeds it up. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3692172]

引用

页数：4