Development of speckle shearing interferometer error analysis as an aperture function of wavefront divergence

被引:9
作者
Abdullah, WSW
Petzing, JN [1 ]
机构
[1] Univ Loughborough, Wolfson Sch Mech & Mfg Engn, Loughborough LE11 3TU, Leics, England
[2] Malaysian Inst Nucl Technol Res, Bangi 43000, Kajang, Malaysia
关键词
D O I
10.1080/09500340500052887
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Increasing the confidence in whole-field speckle-based optical metrology transducers requires a detailed understanding of the error sources of the respective instruments. The analysis of error contributions to the optical phase output of a Michelson-based speckle shearing interferometer have been modelled. Specific attention has been paid to the effect of the aperture at the image plane, with respect to collimated and non-collimated object illumination. This modelling presents an advance on a previous modelled analytical relationship, which includes partial displacement derivative terms and components as a function of illumination geometries and, importantly, aperture effects. The work has identified a phase error contribution due to the aperture function of between 0.15% and 1.48%, dependent on the object distance, when considering a planar object undergoing predominantly surface to normal deformation.
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收藏
页码:1495 / 1510
页数:16
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