Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

被引：67

作者：

Burckel, D. Bruce ^{[1
]}

Wendt, Joel R. ^{[1
]}

Ten Eyck, Gregory A. ^{[1
]}

Ellis, A. Robert ^{[1
]}

Brener, Igal ^{[1
]}

Sinclair, Michael B. ^{[1
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

ADVANCED MATERIALS | 2010年 / 22卷 / 29期

关键词：

PHOTONIC METAMATERIAL;

D O I：

10.1002/adma.200904153

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 mu m. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.

引用

收藏

页码：3171 / +

页数：6

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