Effect of χN and underlayer composition on self-assembly of thin films of block copolymers with energy asymmetric blocks
被引:3
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作者:
Lawson, Richard A.
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机构:
Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USAGeorgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
Lawson, Richard A.
[1
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Peters, Andrew J.
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机构:
Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USAGeorgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
Peters, Andrew J.
[1
]
Nation, Benjamin D.
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机构:
Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USAGeorgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
Nation, Benjamin D.
[1
]
Ludovice, Peter J.
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Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USAGeorgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
Ludovice, Peter J.
[1
]
Henderson, Clifford L.
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Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USAGeorgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
Henderson, Clifford L.
[1
]
机构:
[1] Georgia Inst Technol, Sch Chem & Biomol Engn, Atlanta, GA 30332 USA
来源:
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VII
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2015年
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9423卷
关键词:
directed self-assembly;
block copolymer;
molecular dynamics;
thin film morphologies;
cohesive energy density;
simplified BCP models;
DIBLOCK COPOLYMER;
DENSITY MULTIPLICATION;
SURFACE-TENSION;
POLYSTYRENE;
ORIENTATION;
SIMULATION;
INTEGRATION;
MODEL;
D O I:
10.1117/12.2086047
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
Many high chi block copolymer (BCP) systems often have one block which shows a strong preference to wet the free interface at the top of the film. This property makes it difficult to form vertically aligned lamellae which are desired for many directed self-assembly (DSA) applications. To better understand this behavior, simulations of thin films of BCPs were carried out using a coarse-grained molecular dynamics (MD) model. The property that leads one block to preferentially wet the free interface over the other is a difference in cohesive energy density (CED) between the two blocks. Our simulation allows for the systematic variation in the CED of each block to investigate how the magnitude of these differences affects self-assembly behavior. BCPs with no CED differences between the blocks show large ranges of underlayer compositions where vertical lamellae will form that are minimally affected by changing chi of the BCP. The range where vertical lamellae will form can be thought of as a process window. Increasing the CED asymmetry of the BCP (i.e. the difference in CED between blocks) causes a reduction in the process window and also causes a shift in the underlayer composition that is the center of the window. Increasing chi increases the process window for vertical lamellae in CED asymmetric systems. This behavior is determined by the trade-off in energy due to three interfacial interactions: A-B interface, film-free surface interface, and film-underlayer interface. At the limits of very high CED asymmetry and low chi, there may be no underlayer compositions where vertical lamellae will form. A simplified model was also developed that can accurately predict these process windows for different CED asymmetry and chi values on the order of seconds and minutes compared to hours and days for the full simulation.
机构:
Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Chang, Boyce S.
Loo, Whitney S.
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机构:
Univ Chicago, Pritzker Sch Mol Engn, Chicago, IL 60637 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Loo, Whitney S.
Yu, Beihang
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机构:
Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Yu, Beihang
Dhuey, Scott
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机构:
Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Dhuey, Scott
Wan, Lei
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机构:
Western Digital, San Jose, CA 95119 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Wan, Lei
Nealey, Paul F.
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h-index: 0
机构:
Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Univ Chicago, Pritzker Sch Mol Engn, Chicago, IL 60637 USA
Mat Sci Div, Argonne Natl Lab, Lemont, IL 60439 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
Nealey, Paul F.
Ruiz, Ricardo
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机构:
Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USALawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
机构:
Global Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South KoreaGlobal Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South Korea
Park, Woon Ik
Choi, Young Joong
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机构:
Pusan Natl Univ, Sch Mat Sci & Engn, Busan 609735, South KoreaGlobal Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South Korea
Choi, Young Joong
Yun, Je Moon
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机构:
Global Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South KoreaGlobal Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South Korea
Yun, Je Moon
Hong, Suck Won
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机构:
Pusan Natl Univ, Dept Cognomechatron Engn, Busan 609735, South KoreaGlobal Frontier R&D Ctr Hybrid Interface Mat HIM, Busan 609735, South Korea