共 21 条
[1]
PHOTOLYTIC TECHNIQUE FOR PRODUCING MICROLENSES IN PHOTOSENSITIVE GLASS
[J].
APPLIED OPTICS,
1985, 24 (16)
:2520-2525
[2]
BORRELLI NF, 1994, IEEE 44 EL COMP TECH, P338
[7]
Chung CK, 2007, MICROSYST TECHNOL, V13, P523, DOI [10.1007/s00542-006-0193-0, 10.1007/S00542-006-0193-0]
[8]
General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (06)
:3730-3733