Experimental investigation of plasma dust and plasma polymerization

被引：0

作者：

Qiu, ZG ^{[1
]}

Jing, GY ^{[1
]}

Zhao, ZF ^{[1
]}

Bao, WD ^{[1
]}

机构：

[1] Beijing Inst Printing, Beijing 102600, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2000年 / 131卷 / 1-3期

关键词：

plasma dust; plasma polymerization;

D O I：

10.1016/S0257-8972(00)00851-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Plasma dust can be one product of plasma polymerization. When polymerization occurs on the surface of a substrate, the product is a film; when polymerization occurs in the plasma volume, the product is plasma dust. Film and dust are different products with different chemical and physical characteristics. Plasma dust is composed of many small spheres with diameters ranging from 0.2 to 0.5 mum. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：525 / 527

页数：3