Efficient fabrication process for metallic structures of submicrometer size

This paper presents a new efficient, inexpensive fabrication process for metallic structures of submicrometer size scale. The process combines nanomachining and cold-welding transfer printing. Nanomachining is utilized to fabricate a Ni-P mother mold with designed pattern. The mother mold pattern is replicated to a PMMA stamp. After depositing an Au thin film on the surface of the PMMA stamp, the stamp is used to transfer print Au micro/nano structures onto a quartz substrate also deposited with a thin Au film. The adhesion mechanism is called cold-welding, based on avalanche adhesion between two metallic surfaces. A 5 mm * 2.1 mm area Au nanograting pattern is used as a test pattern. The pitch size of the pattern is 700 nm.